Atomic Layer Deposition and Chemical Vapor Deposition

NANO3D SYSTEMS, LLC expand its product portfolio to ALD & CVD metal-organic precursors for deposition of Iridium (Ir), Palladium (Pd), Platinum (Pt), Ruthenium (Ru), Rhodium (Rh), Gold (Au), Silver (Ag), Cobalt (Co), Nickel (Ni) and Copper (Cu) conformal films and nano-layers. The specialty chemicals, metal-organic precursors, are provided in collaboration with NANO3D’s partner.