Conformal Cobalt Barrier Electroless Plating Solution

$52.90$64.49

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SKU: ELN-EL3-580A-01 Category: .

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Description

Packaging

1 liter poly bottle, 1 gallon or 5 gallon pail, meeting UN requirements, unless otherwise specified.

  • Conformality up to 95%
  • Corrosion resistant
  • Amorphous CoWP barrier crystallization temperature > 350 oC
  • No interdiffusion in CoWP/Cu layers at 350 oC for 60 min
  • CoW(>2%)P(>12%)
  • Roughness of 1 nm to 15 nm for 45 nm to 200 nm CoWP films
  • Thickness continuity < 10 nm
  • Adhesion to dielectric substrates > 65 MPa

Features and Benefits

  • Conformal electroless NiWP films
  • High throwing power
  • Selective plating
  • Surfaces are uniform and smooth with well-controlled thickness and excellent uniformity
  • Diffusion barrier
  • Adhesion layer
  • Plateable barrier
  • Qualified bath metrology to replenish and maintain electroless NiWP plating bath

General description

Electroless Cobalt Tungsten Phosphorus Platingis an electroless acid cobalt process engineered for platingcobalt patterns and redistribution layers as well as filling vias and trenches on wide varieties of substrates including semiconductors, glass, polymers et al. NANO3D’s Electroless Cobalt Tungsten Phosphorus Plating process can be plated onto sub-5 μm features when used in conjunction with NANO3D’s Photopatternable Catalytic Resist. The blend of elements in NANO3D’s Electroless Cobalt Tungsten Phosphorus Plating solution prevents crystallization, provides excellent throwing power, and provides a diffusion barrier between substrates and other metals.

 
 

Safety & Documentation

Safety Information

Download Safety Data Sheet Contact NANO3D SYSTEMS LLC for Certificate of Analysis.


SPECIFICATION (Rev. 1 090307)

ELN-EL3-580A-01
Stock Solution EL3 for Electroless CoW Plating
COMPOSITION:

ASSAY SPECIFICATION TEST METHOD
Cobalt Sulfate Hexahydrate 25 ± 2.5 g/L Spectrophotometry
Boric Acid 30 ± 3 g/L Titration
Sodium Citrate 140 ± 14 g/L Titration
Sodium Tungstate Dihydrate 35 ± 3.5 g/L Titration
Wetting Agent 0.1 ± 0.01 g/L HPLC
pH 9 ± 0.1 @ 23 ± 1ºC pH meter

Metals

 

Al (Aluminum)

 

 
< 10 ppm

 

ICPMS

 

 

 

 

As (Arsenic)

 

< 10 ppm

 

ICPMS

 

 

 

Au (gold)

< 10 ppm

ICPMS

 

 

 

Ca (Calcium)

< 10 ppm

ICPMS

 

 

 

Cd (Cadmium)

< 10 ppm

ICPMS

 

 

 

Co (Cobalt)

< 10 ppm

ICPMS

 

 

 

Cr (Chromium)

< 10 ppm

ICPMS

 

 

 

Fe (Iron)

<10 ppm

ICPMS

 

 

 

In (indium)

< 10 ppm

ICPMS

 

 

 

Mg (Magnesium)

< 10 ppm

ICPMS

 

 

 

Mn (Manganese)

< 10 ppm

ICPMS

 

 

 

K (Potassium)

<100 ppm

ICPMS

 

 

 

Na (Sodium)

< 100 ppm

ICPMS

 

 

 

Ni (Nickel)

< 10 ppm

ICPMS

 

 

 

Pb (Lead)

< 10 ppm

ICPMS

 

 

 

Sn (Tin)

< 10 ppm

ICPMS

 

 

 

Tl (Thallium)

< 10 ppm

ICPMS

 

 

 

Zn (Zinc)

< 10 ppm

ICPMS

 

 

 

Particles                    
(> 0.25 mm)

 

≤ 200 counts/ml

 

Laser Particle Counter

 

 

SHELF LIFE: This solution has 12 months shelf life.

PACKAGING: 1 liter poly bottle, 1 gallon or 5 gallon pail, meeting UN requirements, unless otherwise specified.

Additional Info

OPERATING CONDITIONS

Formulation of NANO3D’s ElectrolessCoWP plating solution W/W (%)
ElectrolessCoW plating Stock Solution > 98 %
Sodium Hypophosphite 10 – 20 g/l
Temperature 55 °C – 80 °C
pH 8.5 – 9.3