Permalloy Electroplating Solution

$66.52$845.35

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SKU: ELN-EC6-20P-01 Category: .

Product Details

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Description

Packaging

1 liter poly bottle, 1 gallon or 5 gallon pail, meeting UN requirements, unless otherwise specified.

Quality and Deposits Characteristics

  • Density of 8.7 g/cm3
  • Composition (Wt. %) of 80%Ni, 20%Fe
  • Internal Stress (MPa) of 30 ± 10
  • Resistivity ~ 25 µohm-cm
  • Thermal stability ~ 360-390C
  • Modulus ~ 140 GPa
  • 0.2% YS ~ 1.25 GPa
  • Nano-indentation hardness ~ 6.7 GPa

Features and Benefits

  • Deposits have low internal stress and are very ductile
  • Surfaces are uniform and smooth with well-controlled thickness and excellent uniformity
  • As plated Ni films have small grains in the range of 10 – 50 nm.
  • Qualified bath metrology for replenishment and a long shelf life

General description

Permalloy electroplating chemicals and processes are designed for the fabrication of low stress, smooth and pinhole-free permalloy films.

 
 

Safety & Documentation

Safety Information

Download Safety Data Sheet Contact NANO3D SYSTEMS LLC for Certificate of Analysis.


SPECIFICATION

Permalloy Electroplating Solution
ELN-EC6- 20P-01
COMPOSITION:

ASSAY SPECIFICATION TEST METHOD
Ni(SO3NH2)2 · 4H2O 164 ± 5 g/L Titration
NiBr2 · xH2O 9  ± 0.3 g/L Titration
FeSO4 · 7H2O 10 ± 0.1 g/L Titration
H3BO3      24 ± 0.5 g/L Titration
Stress reducer   4± 0.2 g/L HPLC
Stabilizer 1± 0.1 g/L Titration
Wetting agent 0.01 ± 0.001 g/L HPLC

 

 

Metals

 

Al (Aluminum)

 

 

< 5 ppm

 

 

ICPMS

 

 

 

As (Arsenic)

< 2 ppm

ICPMS

 

 

 

Ba (Barium)

<5 ppm

ICPMS

 

 

 

Bi (Bismuth)

<5 ppm

ICPMS

 

 

 

Ca (Calcium)

< 10 ppm

ICPMS

 

 

 

Cu (Copper)

< 30 ppm

ICPMS

 

 

 

Cd (Cadmium)

< 1 ppm

ICPMS

 

 

 

Co (Cobalt)

< 1 ppm

ICPMS

 

 

 

Cl (Chloride)

< 200 ppm

ICPMS

 

 

 

K (Potassium)

<1 ppm

ICPMS

 

 

 

Mg (Magnesium)

< 200 ppm

ICPMS

 

 

 

Mn (Manganese)

< 1000 ppm

ICPMS

 

 

 

Pb (Lead)

< 2 ppm

ICPMS

 

 

 

Zn (Zinc)

< 20 ppm

ICPMS

 

 

 

Hg (Mercury)

< 1 ppm

ICPMS

 

 

 

P (Phosphorous)

<5 ppm

ICPMS

 

 

 

Mo (Molybdenum)

<5 ppm

ICPMS

 

 

 

Li (Lithium)

<5 ppm

ICPMS

 

 

 

Sr (Strontium)

<5 ppm

ICPMS

 

 

 


 

Particles                       
(> 0.25 mm)

 

≤ 200 counts/ml

 

Laser Particle Counter

SHELF LIFE: This solution has 12 months shelf life.

PACKAGING: 1 liter poly bottle, 1 gallon or 5 gallon pail, meeting UN requirements, unless otherwise specified.

Additional Info

pH 3.25 ± 0.10
Temperature, (0C) 58±2
Current density (mA/cm2) 15± 1
Flow rate (l/min) 30
Wafer rotating speed (rpm) 150