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$63.19 – $803.08
1 liter poly bottle, 1 gallon or 5 gallon pail, meeting UN requirements, unless otherwise specified.
Permalloy electroplating chemicals and processes are designed for the fabrication of low stress, smooth and pinhole-free permalloy films.
Download Safety Data Sheet Contact NANO3D SYSTEMS LLC for Certificate of Analysis.
Permalloy Electroplating Solution
EP-EC6-20P-01
COMPOSITION:
| ASSAY | SPECIFICATION | TEST METHOD |
| Ni(SO3NH2)2 · 4H2O | 164 ± 5 g/L | Titration |
| NiBr2 · xH2O | 9 ± 0.3 g/L | Titration |
| FeSO4 · 7H2O | 10 ± 0.1 g/L | Titration |
| H3BO3 | 24 ± 0.5 g/L | Titration |
| Stress reducer | 4± 0.2 g/L | HPLC |
| Stabilizer | 1± 0.1 g/L | Titration |
| Wetting agent | 0.01 ± 0.001 g/L | HPLC |
Metals
Al (Aluminum) |
< 5 ppm |
ICPMS |
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As (Arsenic) | < 2 ppm | ICPMS |
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Ba (Barium) | <5 ppm | ICPMS |
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Bi (Bismuth) | <5 ppm | ICPMS |
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Ca (Calcium) | < 10 ppm | ICPMS |
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Cu (Copper) | < 30 ppm | ICPMS |
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Cd (Cadmium) | < 1 ppm | ICPMS |
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Co (Cobalt) | < 1 ppm | ICPMS |
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Cl (Chloride) | < 200 ppm | ICPMS |
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K (Potassium) | <1 ppm | ICPMS |
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Mg (Magnesium) | < 200 ppm | ICPMS |
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Mn (Manganese) | < 1000 ppm | ICPMS |
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Pb (Lead) | < 2 ppm | ICPMS |
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Zn (Zinc) | < 20 ppm | ICPMS |
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Hg (Mercury) | < 1 ppm | ICPMS |
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P (Phosphorous) | <5 ppm | ICPMS |
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Mo (Molybdenum) | <5 ppm | ICPMS |
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Li (Lithium) | <5 ppm | ICPMS |
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Sr (Strontium) | <5 ppm | ICPMS |
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Particles |
≤ 200 counts/ml |
Laser Particle Counter |
SHELF LIFE: This solution has 12 months shelf life.
PACKAGING: 1 liter poly bottle, 1 gallon or 5 gallon pail, meeting UN requirements, unless otherwise specified.
| pH | 3.25 ± 0.10 |
| Temperature, (0C) | 58±2 |
| Current density (mA/cm2) | 15± 1 |
| Flow rate (l/min) | 30 |
| Wafer rotating speed (rpm) | 150 |
